ASTM E2734/E2734M

1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 10⁵ Pa to 10^-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.

Product Details

Published:

06/01/2018

Number of Pages:

4

File Size:

1 file , 140 KB

Note:

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